Collimators

Innovent Technologies is the leading supplier to semiconductor equipment OEMs and FABs of collimators used in the physical vapor deposition (PVD) processing of wafers and flat panel displays.

Since making our first collimator in 1991 we have sold more than 40,000 units worldwide.

Offering a variety of materials and finishes, including:

  • Stainless steel, titanium, Inconel and specialty high-temperature alloys
  • Bare metallic material
  • Grit blast textured finish
  • Metallic flame spray textured finish
  • Integral shields, flanges, clamp rings, or core only

Typical sizes and configurations:

  • 1/8” to 3/4” cells
  • Up to 3" cell height
  • Round, square and rectangle
  • Custom patterns (using wire EDM)

All collimators are UHV cleaned and double bagged per industry standards in our Class 100 cleanroom.