Substrate Cold Plates

Innovent Technologies has supplied cooling plates to a leading vacuum systems manufacturer since 2007. What started out as a build-to-print project quickly became a joint development program to solve a series of manufacturing, operational and reliability challenges.

  • Innovent Technologies now supplies multiple designs and configurations of substrate cool plates to fit different application needs.
  • We have expanded our portfolio to include several cold plate, cooling rings, and other customized substrate/bearing cooling devices.
  • These components are tested for a high degree of flatness, pressure rating, and system-fit, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom.

Materials and techniques used:

  • Aluminum (machined and/or electron beam welding)
  • Embedded copper tubing cooling coils
  • Various substrate support materials