Chucks and related components

Innovent Technologies supplies a range of parts for our OEM customers’ substrate handling solutions. Whether it’s a simple lift pin or a complex, tight tolerance, complete lifting mechanism, Innovent Technologies can design and build a solution for you.

Components are tested on our 36"W x 48"L x 31"H automated CMM for a high degree of flatness and true positioning of wafer placement, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom.

Expertise

  • Designing for manufacturability
  • Precision CNC machining
  • Cleanroom assembly and testing

Experience

  • Active cooling chucks
  • Vacuum grip chucks
  • Aligners
  • Lift mechanisms (shelves and pins)